Titanium dioxide (TiO2) thin films have been deposited onto glass substrate by a spray pyrolysis technique at different substrate temperatures (Ts = 375 - 450οC) and annealed at 500οC in air. The annealed films were characterized by X-ray diffraction, scanning electron microscopy, energy dispersive analysis and UV-Visible spectroscopy in order to identify their Structure, phases, morphologies, composition and optical properties respectively. The XRD profiles showed that the films were polycrystalline, anatase (A) type and oriented predominantly to the A (101) plane. The optical properties of the films were systematically studied using the optical transmittance and reflectance data. The energy band gap and refractive index of the films were evaluated.
