Synthesis of Cu-doped ZnO Thin Film and its Study related to NO2 Gas Sensing Properties
Cu-doped ZnO thin film was synthesized on glass substrate using chemical bath deposition method at room temperature, exhibiting a hexagonal wurtzite structure with a crystallite size of 17.53 nm for 5 wt% Cu doping. The SEM image of the film’s crystallites displays a spherical morphology with an average size of approximately 100 nm. Gas sensing studies towards NO2 gas revealed a linear response up to 50 ppm with sensitivities of 1.64, 2.17, and 3.11 for 10, 25, and 50 ppm, respectively and 3.72 at 100 ppm without full saturation.